F-theta lenses are widely used in scanning systems due to their precision location characteristics. Lens arrays are effective for light integration and image improvement. For instance, aspheric and Fresnel lenses can effectively improve image quality and chromatic aberrations and reduce the size of optical devices. Optical freeform surfaces find applications in fields such as of optics, medicine, fiber communication, life science, and aerospace. Despite the etching method requiring more procedures to remove the Pt coating layer after FIB milling, it is a feasible method for diamond tools with under 500 nm width.įreeform surfaces can be used in optical systems to achieve novel functions, improve performance, reduce size, and decrease the cost of various products. However, the ultra-precision grinding method is not recommended for removing the Pt coating layer when the cutting tool width is smaller than 500 nm, because the possibility that the diamond cutting tool is damaged by the grinding process will be increased. Experimental results show that when the diamond cutting tool width is bigger than 500 nm, ultra-precision grinding method is appropriate for removing Pt coating layer on diamond tool. The ultra-precision grinding method and etching with aqua regia method have been investigated for removing the Pt coating layer. The optimum Pt coating depth has been confirmed, which is very important for maintaining cutting tool edge sharpness and decreasing processing procedures. In this study, the depth of Pt coating layer which could decrease process-induced damage during FIB fabrication is investigated, along with methods for removing the Pt coating layer on diamond tools. To protect the diamond substrate, a protection layer-platinum (Pt) coating is essential in diamond FIB milling. In the FIB milling process, the surface properties of the diamond cutting tool is affected by the amorphous damage layer caused by the FIB gallium ion collision and implantation and these influence the diamond cutting tool edge sharpness and increase the processing procedures. Despite diamond’s extreme physical properties, diamond can be micro/nano machined relatively easily using a focused ion beam (FIB) technique. However, for manufacturing nanoscale diamond tools, these machining methods are not appropriate. Popular non-contact methods for the macro/micro processing of diamond composites are pulsed laser ablation (PLA) and electric discharge machining (EDM). To make sub-micro patterns on these products, micro/nanoscale single-crystal diamond cutting tools are essential. In recent years, nanomachining has attracted increasing attention in advanced manufacturing science and technologies as a value-added processes to control material structures, components, devices, and nanoscale systems.
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